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Vacuum Pump - Turbo Pump
 
 
 
 
 
 
Turbo-V
81 M
Turbo-V
81 T
Turbo-V 301
Navigator
Turbo-V 551
Navigator
Turbo-V 701
Navigator
Turbo-V 1001
Navigator
Pump Model
Turbo-V
81 M
Turbo-V
81 T
Turbo-V 301
Navigator
Turbo-V 551
Navigator
Turbo-V 701
Navigator
Turbo-V 1001
Navigator
Pump Specification
DN 40
DN 63
DN 100
DN 160
DN 200
DN 250
Pumping Speed, l/s
Nitrogen
50
77
250
550
690
1050
Helium
56
65
220
600
620
900
Hydrogen
46
50
200
510
510
920
Compression Ratio
Nitrogen
5 x 108
7 x 108
7 x 108
> 1 x 109
1 x 109
1 x 109
Helium
8 x 104
3 x 103
1 x 105
1 x 107
1 x 107
1 x 107
Hydrogen
7 x 103
3 x 102
1 x 104
1 x 106
1 x 106
1 x 106
Base pressure, mbar
with recommended
mechanical pump
5 x 10-10
5 x 10-9
< 5 x 10-10
< 1 x 10-10
< 1 x 10-10
< 1 x 10-10
with recommended
dry pump
5 x 10-9
5 x 10-8
< 5 x 10-9
< 1 x 10-10
< 1 x 10-10
< 1 x 10-10
Startup Time, min
< 1
< 1
2.5
< 5
< 5
< 4
Rotational Speed,
rpm
80,000
80,000
56,000
42,000
42,000
38,000
Recommended Forepump
Two-stage
mechanical pump
DS 42 -
DS 102
DS 42 -
DS 102
DS 102
DS 302
DS 402
DS 402
Dry pump
SH-110
SH-110
SH-110
TS300
TS300
TS300
Inlet Flange, nominal diameter
Klamp Flange, mm
40
-
-
-
-
-
ConFlat?, mm
(inches OD)
35 (2.75)
63 (4.5)
100 (6)
160 (8)
200 (10)
-
ISO clamp style, mm
-
63
100
160
200
250
ISO-F bolted, mm
-
-
-
160-F bolted
200-F bolted
250-F bolted
Foreline Flange, nominal diameter
Klamp Flange
NW16
NW16
NW16
NW25
NW25
NW40
SEM Version
Available on Request
-
-
?
?
?
?
Controllers
Rack Controller
?
?
?
?
?
?
Navigator on board
Controller
?
?
?
?
?
?
Integrated lectronics
-
-
-
-
-
-
PCB Controller
?
?
?
-
-
-
 

 

Vacuum Pump - Turbo Pumping System
 
TPS-mobile
Features
Completely dry, high capacity pumping systems
Higher compression ratio and pumping speed
Roll around Cart or Bench solutions
Two voltages 110 / 230 V
Versatile and Reliable
Fast Start Up
Turbomolecular Pumps from 46 to 600 l/sec
T-Plus Navigator Software allows communication with your PC
Dry Scroll or Rotary Vane Primary Pumps
Gauges and Accessories available
Custom solutions available
 
Benefits
Fast, clean, dry pump down from atmosphere to 10 E–10 mbar
Pressure monitor                  Portable and compact
No maintenance required       Low cost of ownership
 
Applications
UHV System pump down          Ion pump roughing
Lamp and tube processing        Cryopump regeneration
High Vacuum Systems operation
High and Ultra High Vacuum systems bake out
 
TPS-bench
 
TPS-compact
 
                                    
Features
New Generation Turbomolecular Pump Turbo-V 81-M
and TV301 Navigator
Compact, Light, Dry, Clean and Robust System
Voltage 110-220 V - CE/CSA certified
RS-232 or Analogical Communication
Large pressure data display on board
Pressure driven set point, Analog set point
IDP-3 Dry Scroll backing pump
This product can be offered with wheels
Benefits
Designed for demanding applications
Cost-effective pumping solution
Can be used world-wide
Easy to use: plug and play system
Complies with world-wide safety standards
Easy system pressure measurement
Easy Tip-seal replacement
Excellent base pressure up to 10-9 mbar
Easy to be moved in small space
Applications
 
 
 
Electron Microscopy
and Mass Spectrometry
Industrial
Applications
Semiconductor
Manufacturing
High Energy Physics
Research & Labs
 



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