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XT100, XT200, XT300 Residual Gas Analyzer Includes built-in ion and pirani gauges
 
The XT residual gas analyzer (RGA) from Extorr offers exceptional performance and value.
These RGAs provide a more detailed vacuum gas analysis than is offered by any other single
competitive device. Each system comes complete with a multi-gauged quadrupole probe, a
control and communications unit (CCU), and a real-time Windows? software package.

xtga.jpg

Residual Gas Analyzer with Integrated Pirani and Ion Gauge
100, 200 and 300 amu systems
Faraday Detector with optional Electron Multiplier
Real-time Windows? software capable of Multi-head operation
Field Replaceable Dual Thoriated Iridium Filaments
Better than 1 amu resolution
8 orders of magnitude dynamic range in a single scan
Mass spectra, leak detection and pressure vs. time modes
Built in Diagnostics, Easily upgradeable Software and Firmware
Fully Insertable Probe
 
Operational
Technical Specification
Mass range
XT100, XT100M
1 to 100 amu
XT200, XT200M
1 to 200 amu
XT300, XT300M
1 to 300 amu
Mass filter type
Quadrupole
Resolution
Greater than 1 amu @ 10% peak height, adjustable
Operating pressure
Atmosphere to UHV ( ion gauge operation below 10-2 torr, RGA
operation below 10-3 torr and Multiplier operation below 10-6 torr)
Partial Pressure Detector type
Faraday cup
Partial Pressure Sensitivity (A/Torr)
5x10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu
full peak width, 10% height, 70 eV electron energy, 6 eV ion energy
and 2 mA electron emission current.
Minimum detectable partial pressure
5x10-14 torr with Multiplier. Measured with N2 @ 28 amu with 1 amu
full peak width, 10% height, 70 eV electron energy, 6 eV ion energy,
and 2 mA electron emission current. 10-11 torr with Faraday cup.
Total Pressure Detector type  >10-3 Torr
Pirani type, (measures heat loss from noble metal wire)
Total Pressure Detector type  <10-3 Torr
Bayard/Alpert type ion gauge, x-ray limit 10-9
CCU Max. operating temperature
70°C
CCU temperature sensor
solid state sensor in CCU, temperature continuously monitored
and displayed
Bakeout temperature
350°C (without CCU)
Probe operating temperature
100°C,  Platinum RTD on probe, temperature continuously
monitored and displayed
Ionizer Design
Open ion source , electron impact ionization.
Probe Materials
SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel
Filament
Dual Thoriated Iridium with firmware protection.
Degas
Built-in 1 to 30 W ramp-up.
Electron energy
10 to 150 V, continuously programmable
Ion energy
3 to 10 V, continuously programmable
Electron emission current
0.1 to 5 mA, continuously programmable
Probe mounting
Minimum tube I.D. 1.375"  flange 2.75" CF
CCU dimensions
3.3" x 4.8"x 7.5". Easily separated from the probe for bakeout
Mass stability
±0.1 amu after 30 minutes warmup.
Computer interface
RS-232C, 9600 - 115,200 Baud
Software
Windows?  2000, XP based application.
Power requirement
24 VDC @ 2.1 Amps. Standard 120 VAC adapter supplied.
Weight
5 lbs.
 



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