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Vacuum Pump - Diffusion Pump – AX-65 / HS-2 / VHS-4 / VHS-6
 
 
 
 
AX-65
HS-2
VHS-4
VHS-6
 
Pump Model
AX-65
HS-2
VHS-4
VHS-6
Previous Model Number
-
0160
0183
184
Speed, l/s (operating range)
 
 
 
 
Air
65
160
750
1,550
Helium & Hydrogen
90
200
940
1,930
Maximum forepressure, Torr (mbar)
 
 
 
 
No load
0.75 (1.00)
0.55 (0.72)
0.65 (.86)
0.65 (0.85)
Full load
0.60 (0.78)
0.40 (0.52)
0.55 (.73)
0.55 (0.72)
Maximum throughput,
 
 
 
 
T-l/s (mbar-l/s) In operating range
0.19 (0.25)
0.60 (0.80)
1.5 (2.0)
2.4 (3.2)
@ 1 x 10-2 Torr (1.3 x 10-2 mbar)
0.30 (0.40)
0.70 (0.93)
2.5 (3.2)
3.5 (4.5)
Minimum recommended backing pump
for maximum throughput, cfm (m3/hr)
0.15 (0.25)
5.0 (8.5)
10 (17)
17.0 (28.9)
Backstreaming rate at inlet flange
mg/cm2/min (standard cold cap)*
2 x 10-4
1 x 10-3
5 x 10-4
5 x 10-4
Warmup time, minutes
7
15
10
10
Cooldown time, minutes
With quick cool coil, where applicable
-
10
10
10
Fluid charge
30cc
100 cc
300 cc
500 cc
Electrical requirements
1 ph
50/60 Hz
90/115/165/220 V
1 ph
50/60 Hz
120/240 V
1 ph
50/60 Hz
120/208/240 V
1 ph
50/60 Hz
120/208/240 V
Power, Watts
200/250
450
1450
2200
Cooling water, U.S. gpm (l/hr)
at 60-80° F (15-26 °C)
N/A
0.1 (20)
0.15 (30)
0.25 (50)
 

 

Vacuum Pump - Diffusion Pump – VHS-250 / VHS-10 / VHS-400 / HS-16
 
 
 
 
VHS-250
VHS-10
VHS-400
HS-16
 
Pump Model
VHS-250
VHS-10
VHS-400
HS-16
Previous Model Number
0185
0164
Speed, l/s (operating range)
 
 
 
 
Air
2,125
3,650
4,500
6,000
Helium & Hydrogen
2,660
4,560
5,625
7,500
Maximum forepressure, Torr (mbar)
 
 
 
 
No load
0.65 (.85)
0.65 (.85)
0.65 (.85)
0.65 (.85)
Full load
0.55 (0.72)
0.55 (0.72)
0.55 (0.72)
0.55 (.72)
Maximum throughput,
 
 
 
at 8100 W
T-l/s (mbar-l/s) In operating range
2.6 (3.5)
6.3 (8.4)
6.3 (8.4)
9.5 (11.7)
@ 1 x 10-2 Torr (1.3 x 10-2 mbar)
3.5 (4.5)
7.5 (10.0)
7.5 (10.0)
11.5 (15.3)
Minimum recommended backing pump
for maximum throughput, cfm (m3/hr)
17.0 (28.9)
30 (51)
30 (51)
80 (136)
Backstreaming rate at inlet flange
mg/cm2/min (standard cold cap)*
5 x 10-4
5 x 10-4
1 x 10-3
1.5 x 10-3
Warmup time, minutes
15
15
30
45
Cooldown time, minutes
With quick cool coil, where applicable
10
25
25
48
Fluid charge
1,000 cc
1,000 cc
3 U.S. qts.
5 U.S. qts.
Electrical requirements
3 ph
50/60 Hz
120/208/240 V
3 ph
50/60 Hz
208/240/380/480 V
3 ph
50/60 Hz
208/240/380/480 V
3 ph
50/60 Hz
240/415/480 V
Power, Watts
2200
4400
4400
8100/9600
Cooling water, U.S. gpm (l/hr)
at 60-80° F (15-26 °C)
0.25 (50)
0.40 (80)
0.40 (80)
1.5 (300)
 

 

Vacuum Pump - Diffusion Pump – HS-20 / HS-32 / HS-35
 
 
 
 
HS-20
HS-32
HS-35
 
 
 
 
Pump Model
HS-20
HS-32
NHS-35
Previous Model Number
0165
0167
0169
Speed, l/s (operating range), Air
10,000
17,300
28,000
Helium & Hydrogen
12,500
21,625
35,000
Maximum forepressure, Torr (mbar)
 
 
 
No load
0.65 (.85)
0.50 (.65)
0.55 (.71)
Full load
0.55 (.72)
0.35 (.45)
0.40 (.52)
Maximum throughput,
 
 
 
T-l/s (mbar-l/s) In operating range
12.5 (16.7)
30 (40)
25 (33)
@ 1 x 10-2 Torr (1.3 x 10-2 mbar)
18 (23.4)
35 (45.5)
35 (45.5)
Minimum recommended backing pump
for maximum throughput, cfm (m3/hr)
100 (170)
300 (510)
300 (510)
Backstreaming rate at inlet flange
mg/cm2/min (standard cold cap)*
1.5 x 10-3
7 x 10-4
5 x 10-4
Warmup time, minutes
60
60
-
Cooldown time, minutes
With quick cool coil, where applicable
85
180
180
Fluid charge
3 U.S. gal.
(4.7 liters)
3 U.S. gal.
(11.3 liters)
3 U.S. gal.
(11.3 liters)
Electrical requirements
3 ph, 50/60 Hz
240/415/480 V
3 ph, 50/60 Hz
240/415/480 V
3 ph, 50/60 Hz
240/415/480 V
Power, Watts
12000
24000
24000
Cooling water, U.S. gpm (l/hr)
at 60-80° F (15-26 °C)
1.5 (300)
4.0 (800)
4.0 (800)
 



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