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Vacuum Pump - Cryo Pump - CP-8 / CP-8LP / CP-10 / CP-16
 
CP- 8 Cryopump
Standard cryopump for clean, oil free high vacuum pumping for research and production applications offered
at highly competitive pricing. Standard cryopump applications: sputtering tools, ion implanters, R&D bell-jar
systems,surface analysis, accelerators, beam lines And general vacuum systems.
CP- 8LP Cryopump
Standard cryopump configuration for semiconductor tools the CP-8LP is ideal for space constrained applications
requiring clean, oil free high vacuum pumping solutions.
CP- 10 Cryopump
Generally considered the most efficient cryopump design the 10” ANSI / 14” OD Conflat achieving double the gas
and water volume of the CP-8 cryopump, providing clean, oil free high vacuum pumping solutions. Standard
applications: Semiconductor, Aerospace & vacuum coating as well as R&D.
CP- 16 Cryopump
Standard cryopump in use on larger box-coating systems, space simulation chambers, electron beam coating
systems requiring clean, oil free high vacuum pumping solutions.
 



CP- 8






CP- 8LP

CP-10

CP-16
 
Specification
CP-8
CP-8LP
CP-10
CP-16
Gas Pumping speeds
( liters/second )
Water
4000
4000
9000
16000
Air
1500
1500
3000
5000
Hydrogen
2200
2200
5000
5000
Argon
1200
1200
2500
4200
Gas capacities
( standard liters @ 5x10-6 Torr )
Hydrogen
12
12
24
15
Argon
1000
1000
2000
2500
Throughput
Argon
700 sccm
700 sccm
1500 sccm
500 sccm
Crossover
Torr-liters
150
150
300
300
Cool down time
60 Hertz
90 min
90 min
60 min
150 min
Cryopump measurements
Height
7.03"
7.03"
23.9"
24"
Length
22.6"
22.6"
-
22.6"
Weight
42 lbs
42 lbs
85 lbs
-
Inlet flange
ANSI/ISO/CF
ANSI/ISO/CF
ANSI/ISO/CF
ISO/CVC
 



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Copyright © 2007 Best Champion Technology Co., Ltd. , All Rights Reserved. Tel: 03-561-0288 Fax: 03-561-0878 E-mail: sales@bcv.com.tw

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